http://www4.wiwiss.fu-berlin.de/bizer/BerlinSPARQLBenchmark/

Code: GPL:
http://sourceforge.net/projects/bsbmtools/
http://sourceforge.net/projects/bibm/

The query templates are available in teh source code (so are GPL).
You need the locally generated data to run queries as the locally
generated data includes the paramters for the query templates.